Netherlands · Electrical machinery, apparatus, equipment and consumables
Official title · Nederlands
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Official title · Nederlands
Metrology SEM+FIB system
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Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO · Netherlands
View notices under this nameOfficial summary · Nederlands
The main purpose of this FIB/SEM equipment is to perform material milling (cutting), 3D characterization, and cross section analysis of epitaxially grown InP, InGaAs, InAlGaAs and InGaAsP layers on InP substrates. The structures may also contain polymer-based planarization layers, SiOx or SiNx dielectric layers and TiPtAu or NiGeAu metal layers. Levering van één SEM +FIB systeem
Machine translation for guidance. The official summary remains authoritative.
The main purpose of this FIB/SEM equipment is to perform material milling (cutting), 3D characterization, and cross section analysis of epitaxially grown InP, InGaAs, InAlGaAs and InGaAsP layers on InP substrates. The structures may also contain polymer-based planarization layers, SiOx or SiNx dielectric layers and TiPtAu or NiGeAu metal layers. Levering van één SEM +FIB systeem
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Data is restructured for easier reading. The official notice and procurement documents always prevail.
TED · 519634-2026. Checked on Aug 24, 2026, 4:05 AM.
Data is restructured for easier reading. The official notice and procurement documents always prevail.
