Official summary
What is being procured?
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ra
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TED · 628101-2026. Checked on Sep 11, 2026, 10:05 AM.
https://ted.europa.eu/en/notice/-/detail/628101-2026
Notice history
Procurement timeline
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Data is restructured for easier reading. The official notice and procurement documents always prevail.
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TED · 628101-2026. Checked on Sep 11, 2026, 10:05 AM.
Data is restructured for easier reading. The official notice and procurement documents always prevail.