Sintesi ufficiale · English
Che cosa viene acquistato?
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools.…
Traduzione automatica indicativa. Il riepilogo ufficiale resta il riferimento.
Sintesi ufficiale · English
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools.…
Cronologia dell’avviso
Cronologia della procedura di appalto
Segui le fasi principali e gli aggiornamenti relativi a questa procedura di appalto.
Non è stato ancora individuato nessun altro avviso correlato.
I dati sono riorganizzati per agevolarne la lettura. L’avviso ufficiale e i documenti di gara prevalgono sempre.
Fonte e affidabilità
TED · 628101-2026. Verificato il 11 set 2026, 10:05.
I dati sono riorganizzati per agevolarne la lettura. L’avviso ufficiale e i documenti di gara prevalgono sempre.