Resumen oficial · English
¿Qué se contrata?
The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. The MTPF shall be delivered with four 200 mm compatible tubes: – Tube 1: atmospheric thermal dry and wet oxidation (quartz tube up to 1050°C; optional SiC tube
Traducción automática orientativa. El resumen oficial sigue siendo la referencia.
Resumen oficial · English
The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. The MTPF shall be delivered with four 200 mm compatible tubes: – Tube 1: atmospheric thermal dry and wet oxidation (quartz tube up to 1050°C; optional SiC tube
Gratis
Reciba las próximas licitaciones de este sector
Reciba nuevos anuncios que coincidan con sus criterios en un correo semanal. Revise o ajuste los criterios antes de activar su alerta gratuita.
Historial del anuncio
Cronología del procedimiento de contratación
Sigue las principales etapas y actualizaciones vinculadas a este procedimiento de contratación.
Todavía no se ha identificado ningún otro anuncio relacionado.
-
Anuncio de rectificación Anuncio actual
· TED 491989-2026
Secciones modificadas: 1 Abrir el anuncio oficial ↗
Los datos se reestructuran para facilitar su lectura. El anuncio oficial y los documentos de contratación siempre prevalecen.
Fuente y fiabilidad
TED · 491989-2026. Verificado el 23 ago. 2026 18:05.
Los datos se reestructuran para facilitar su lectura. El anuncio oficial y los documentos de contratación siempre prevalecen.