Achoimre oifigiúil · English
Cad atá á sholáthar?
The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. The MTPF shall be delivered with four 200 mm compatible tubes: – Tube 1: atmospheric thermal dry and wet oxidation (quartz tube up to 1050°C; optional SiC tube
Meaisínaistriúchán mar threoir. Is í an achoimre oifigiúil an tagairt údarásach.
Achoimre oifigiúil · English
The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. The MTPF shall be delivered with four 200 mm compatible tubes: – Tube 1: atmospheric thermal dry and wet oxidation (quartz tube up to 1050°C; optional SiC tube
Saor in aisce
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Faigh ríomhphost seachtainiúil le fógraí nua a oireann do do chritéir. Seiceáil nó athraigh na critéir sula ngníomhachtaíonn tú an foláireamh saor in aisce.
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Amlíne an tsoláthair
Lean na príomhchéimeanna agus na nuashonruithe a bhaineann leis an nós imeachta soláthair seo.
Níor sainaithníodh aon fhógra gaolmhar eile go fóill.
Tá na sonraí athstruchtúrtha chun iad a léamh níos éasca. Is iad an fógra oifigiúil agus na doiciméid soláthair a bhíonn i réim i gcónaí.
Foinse agus iontaofacht
TED · 491989-2026. Seiceáilte ar 23 Lún 2026 18:05.
Tá na sonraí athstruchtúrtha chun iad a léamh níos éasca. Is iad an fógra oifigiúil agus na doiciméid soláthair a bhíonn i réim i gcónaí.