Dúnta TED · Foinse · Teanga: English

an Eilvéis · Trealamh saotharlainne, optúil agus beachtais

Teideal oifigiúil · English

Multitube thermal processing furnace (MTPF) for oxidation and LPCVD at the PSI PICO cleanroom

Paul Scherrer Institut (PSI) · an Eilvéis

Féach ar fhógraí faoin ainm seo
Achoimre oifigiúil · English

The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The…

Cad atá á sholáthar?
Spriocdháta 21 Lún 2026 14:00 UTC+02:00
Luach meastaGan fógairt
Foilsithe16 Iúil 2026
Oscail an fógra oifigiúil ↗

Achoimre oifigiúil · English

Cad atá á sholáthar?

The equipment to be procured is a multitube thermal processing furnace (MTPF) essential for the deposition of materials for quantum, photonic and x-ray applications of the groups at the LNQ and LXN laboratories and for all PSI cleanroom users. The MTPF should have a horizontal arrangement of the tubes and should be capable to process in one load up to 50 wafers of 200 mm diameter with good within-wafer, wafer-to-wafer and batch-to-batch uniformity. The MTPF should have an automation option allowing to process, at least, 4 wafer batches of 50 wafers in the same or different tubes one after the other without the presence of operator. The MTPF shall be delivered with four 200 mm compatible tubes: – Tube 1: atmospheric thermal dry and wet oxidation (quartz tube up to 1050°C; optional SiC tube

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    · TED 491989-2026

    Rannáin a athraíodh: 1 Oscail an fógra oifigiúil ↗

Tá na sonraí athstruchtúrtha chun iad a léamh níos éasca. Is iad an fógra oifigiúil agus na doiciméid soláthair a bhíonn i réim i gcónaí.

Foinse agus iontaofacht

TED · 491989-2026. Seiceáilte ar 23 Lún 2026 18:05.

Tá na sonraí athstruchtúrtha chun iad a léamh níos éasca. Is iad an fógra oifigiúil agus na doiciméid soláthair a bhíonn i réim i gcónaí.

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