Virallinen yhteenveto · English
Mitä hankitaan?
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.
Suuntaa antava konekäännös. Virallinen yhteenveto on edelleen ensisijainen.
Virallinen yhteenveto · English
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.
Ilmoitushistoria
Hankintamenettelyn aikajana
Seuraa tähän hankintamenettelyyn liittyviä päävaiheita ja päivityksiä.
Tiedot on jäsennetty helpommin luettaviksi. Virallinen ilmoitus ja hankinta-asiakirjat ovat aina ratkaisevia.
Lähde ja luotettavuus
TED · 693624-2026. Tarkistettu 8.10.2026 klo 11.05.
Tiedot on jäsennetty helpommin luettaviksi. Virallinen ilmoitus ja hankinta-asiakirjat ovat aina ratkaisevia.