Officielt resumé · English
Hvad indkøbes?
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.
Vejledende maskinoversættelse. Det officielle resumé er fortsat gældende.
Officielt resumé · English
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.
Meddelelseshistorik
Udbudsforløb
Følg de vigtigste faser og opdateringer i dette udbud.
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Berigtigelse
· TED 700865-2026
Ændrede afsnit: 1Se bekendtgørelsen på Tenderiva
Åbn officiel meddelelse ↗
Data er omstruktureret for at være lettere at læse. Den officielle meddelelse og udbudsdokumenterne er altid gældende.
Kilde og pålidelighed
TED · 693624-2026. Kontrolleret 8. okt. 2026 11.05.
Data er omstruktureret for at være lettere at læse. Den officielle meddelelse og udbudsdokumenterne er altid gældende.