Официално резюме · English
Какво се възлага?
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.
Машинен превод за ориентация. Официалното резюме остава меродавно.
Официално резюме · English
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.
История на обявлението
Хронология на процедурата за възлагане
Проследете основните етапи и актуализации, свързани с тази процедура за възлагане.
-
Обявление за състезателна процедура Разглеждано обявление
· TED 693624-2026
Отворете официалното обявление ↗
Данните са преструктурирани за по-лесно четене. Официалното обявление и документите винаги имат предимство.
Източник и надеждност
TED · 693624-2026. Проверено на 8.10.2026 г., 11:05 ч..
Данните са преструктурирани за по-лесно четене. Официалното обявление и документите винаги имат предимство.