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Soome · Labori-, optika- ja täppisseadmed

Ametlik pealkiri · English

Wafer metrology

VTT Technical Research Centre of Finland Ltd · Soome

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Ametlik kokkuvõte · English

The object of the tender is semi-automatic wafer metrology tool (later also “tool”) for measurement of total thickness, TTV (total thickness variation), warp, bow, metallization bumps, trench or via depth and geometric factors in substrates typical in semiconductor industry such as but not limited to silicon wafers, chips, stacked wafers, stacked chips, samples containing mixed oxides, or/and thin materials deposited. The tool must be compatible with…

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Tähtaeg 29. mai 2026 06:00 UTC
Eeldatav maksumusTeatamata
Avaldatud28. apr 2026
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Ametlik kokkuvõte · English

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The object of the tender is semi-automatic wafer metrology tool (later also “tool”) for measurement of total thickness, TTV (total thickness variation), warp, bow, metallization bumps, trench or via depth and geometric factors in substrates typical in semiconductor industry such as but not limited to silicon wafers, chips, stacked wafers, stacked chips, samples containing mixed oxides, or/and thin materials deposited. The tool must be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process is described in more detail in the invitation to tender documents.

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  1. Hanketeade Praegune teade

    · TED 290369-2026

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  2. Tulemusteade

    · TED 598555-2026

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Andmed on lihtsamaks lugemiseks ümber struktureeritud. Alati on ülimuslikud ametlik teade ja hankedokumendid.

Allikas ja usaldusväärsus

TED · 290369-2026. Kontrollitud 21. aug 2026 22:07.

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