Awarded TED · Source · Language: Deutsch

Germany · Industrial machinery

Official title · Deutsch

Clustertool for Ion Beam Etching of 300mm wafers

Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. · Germany

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Official summary · Deutsch

What is being procured?

The tender item is an ion beam etching process tool to be used for 300mm wafer fabrication at the FRAUNHOFER IPMS. The systems will be used for the processing of CMOS wafers in a cleanroom class 1000 (approximately class 6 EN ISO 14644-1) production environment. Therefore, it is necessary to fulfill require-ments regarding metal contamination and particle generation compatible with industry standards.

Deadline Not announced
Estimated valueNot announced
PublishedJul 10, 2026
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  1. Result notice Current notice

    · TED 476033-2026

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Data is restructured for easier reading. The official notice and procurement documents always prevail.

Source and reliability

TED · 476033-2026. Checked on Aug 23, 2026, 3:05 PM.

Data is restructured for easier reading. The official notice and procurement documents always prevail.

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