Leping sõlmitud TED · Allikas · Keel: English

Soome · Labori-, optika- ja täppisseadmed

Ametlik pealkiri · English

Wafer metrology

VTT Technical Research Centre of Finland Ltd · Soome

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Ametlik kokkuvõte · English

The object of the tender was semi-automatic wafer metrology tool (later also “tool”) for measurement of total thickness, TTV (total thickness variation), warp, bow, metallization bumps, trench or via depth and geometric factors in substrates typical in semiconductor industry such as but not limited to silicon wafers, chips, stacked wafers, stacked chips, samples containing mixed oxides, or/and thin materials deposited. The tool had to be compatible with…

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Avaldatud31. aug 2026
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Ametlik kokkuvõte · English

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The object of the tender was semi-automatic wafer metrology tool (later also “tool”) for measurement of total thickness, TTV (total thickness variation), warp, bow, metallization bumps, trench or via depth and geometric factors in substrates typical in semiconductor industry such as but not limited to silicon wafers, chips, stacked wafers, stacked chips, samples containing mixed oxides, or/and thin materials deposited. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.

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  1. Hanketeade

    · TED 290369-2026

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  2. Tulemusteade Praegune teade

    · TED 598555-2026

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Andmed on lihtsamaks lugemiseks ümber struktureeritud. Alati on ülimuslikud ametlik teade ja hankedokumendid.

Allikas ja usaldusväärsus

TED · 598555-2026. Kontrollitud 3. sept 2026 11:05.

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