Awarded TED · Source

Finland · Laboratory, optical and precision equipment

Official title · English

Ion beam trimmer

VTT Technical Research Centre of Finland Ltd · Finland

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Official summary

What is being procured?

The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.

Deadline Not announced
Estimated valueNot announced
PublishedSep 3, 2026
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Notice history

Procurement timeline

Follow the main stages and updates linked to this procurement procedure.

  1. Competition notice

    · TED 290586-2026

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  2. Result notice Current notice

    · TED 609219-2026

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Data is restructured for easier reading. The official notice and procurement documents always prevail.

Source and reliability

TED · 609219-2026. Checked on Sep 4, 2026, 9:05 AM.

Data is restructured for easier reading. The official notice and procurement documents always prevail.

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