Official summary
What is being procured?
The University of Twente is tendering to purchase an Electron Beam Lithography system. The MESA+ Institute of the University of Twente will invest in a new Electron Beam system (e-beam system). A system, suitable for defining patterns in electron sensitive resists, at high resolution and high speed, compatible with a wide range of applications and substrate types up to 200mm in diameter. The system will be used by a wide range of users, i.e. academic researchers and students as well as industrial engineers with different backgrounds (photonics, (nano)-electronics etc.) and different levels of expertise.
Notice history
Procurement timeline
Follow the main stages and updates linked to this procurement procedure.
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Data is restructured for easier reading. The official notice and procurement documents always prevail.
Source and reliability
TED · 474919-2026. Checked on Aug 23, 2026, 3:05 PM.
Data is restructured for easier reading. The official notice and procurement documents always prevail.