Resumen de la oportunidad
¿Qué se contrata?
The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a UHV chamber for sputtering of superconductors, a UHV chamber for oxidation, a UHV chamber for Ar ion milling, and a flipping station. The system must allow metalizing both sides of the wafers in situ, with minimal backside particle contamination. The wafers should only be touched on the side (edge gripping).
Fuente y fiabilidad
Fuente: anuncio oficial de TED 579224-2026, comprobado por última vez el 21 ago. 2026 21:07. La publicación original sigue siendo la referencia.
Los datos se reestructuran para facilitar su lectura. El anuncio oficial y los documentos de contratación siempre prevalecen.