2 PVD systemen en materiaal

Officiell sammanfattning · Nederlands

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Lot 1 Explanation The contracting authority intends to purchase a high-quality thin-film deposition system for advanced materials research within the framework of the ERC-funded project THERMAGINE. The system will be used for the deposition and engineering of magnetic metallic and oxide thin films and multilayer stacks with nanometer-scale thickness control. The equipment will primarily be used for the fabrication of magnetic (multilayer) thin films and wedges for nanomagnetic research. The system must therefore provide a high degree of flexibility, reproducibility, process stability and automation. For Technical details see part III Lot 2 Explanation To facilitate exploratory research in the UGent cleanroom, a new physical vapor deposition (PVD) system is required which can handle substra