Oficiali santrauka · Deutsch
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Modular, fully automated prober for optical inspection and electrical contact of electronic, photonic and mi-cro‑mechanical devices — including advanced manufacturing approaches such as quasi‑monolithic integration. The system handles 200 mm wafers as well as frames, tapes, trays and comparable substrates. An end‑to‑end carrier handling system loads carriers with mounted substrates from specialized cassettes, positions them on the prober's vacuum chuck and performs fully automated alignment. A testcard/probe‑card interface is provided for electrical connection. Probe detection and fine positioning are performed automatically to ensure reproducible contact conditions. The control software supports program-mable sequence control and reference‑point based alignment. For optical inspection the
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Oficiali santrauka · Deutsch
Modular, fully automated prober for optical inspection and electrical contact of electronic, photonic and mi-cro‑mechanical devices — including advanced manufacturing approaches such as quasi‑monolithic integration. The system handles 200 mm wafers as well as frames, tapes, trays and comparable substrates. An end‑to‑end carrier handling system loads carriers with mounted substrates from specialized cassettes, positions them on the prober's vacuum chuck and performs fully automated alignment. A testcard/probe‑card interface is provided for electrical connection. Probe detection and fine positioning are performed automatically to ensure reproducible contact conditions. The control software supports program-mable sequence control and reference‑point based alignment. For optical inspection the
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TED · 468896-2026. Patikrinta 2026-08-23 14:05.
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